| 发明名称 | Substrate transfer robot, substrate transfer system, and method for detecting arrangement state of substrate | ||
| 摘要 | A substrate transfer robot includes a hand and a controller. The hand includes at least one detector configured to detect an arrangement state of a substrate in a substrate storage. The controller is configured to control the at least one detector to detect the arrangement state of the substrate in the substrate storage with the hand inclined in plan view toward a rotation center of the substrate transfer robot relative to a substrate storage center line. The substrate storage center line is in a direction perpendicular to a front surface of the substrate storage. | ||
| 申请公布号 | US9355879(B2) | 申请公布日期 | 2016.05.31 |
| 申请号 | US201414284364 | 申请日期 | 2014.05.21 |
| 申请人 | KABUSHIKI KAISHA YASKAWA DENKI | 发明人 | Kimura Yoshiki |
| 分类号 | H01L21/68;H01L21/677;B25J13/08;H01L21/687;B25J9/04;H01L21/67;B25J9/16 | 主分类号 | H01L21/68 |
| 代理机构 | Mori & Ward, LLP | 代理人 | Mori & Ward, LLP |
| 主权项 | 1. A substrate transfer robot comprising: a hand comprising at least one detector configured to detect an arrangement state of a substrate in a substrate storage; and a controller configured to control the at least one detector to detect the arrangement state of the substrate in the substrate storage with the hand inclined in plan view toward a rotation center of the substrate transfer robot relative to a substrate storage center line, the substrate storage center line being in a direction perpendicular to a front surface of the substrate storage, wherein the controller is configured to control the at least one detector to detect the arrangement state of the substrate in the substrate storage when the hand is moved beyond the front surface of the substrate storage and when the hand is inclined in plan view toward the rotation center of the substrate transfer robot relative to the substrate storage center line. | ||
| 地址 | Kitakyushu-Shi JP | ||