发明名称 |
Semiconductor apparatus and manufacturing method of the same |
摘要 |
A semiconductor apparatus according to an embodiment may include a first pipe gate divided by an isolation layer, a first pipe channel layer buried in the first pipe gate, a second pipe gate covering the first pipe channel layer, the first pipe gate and the isolation layer and a second pipe channel layer buried in the second pipe gate. |
申请公布号 |
US9356036(B2) |
申请公布日期 |
2016.05.31 |
申请号 |
US201414488879 |
申请日期 |
2014.09.17 |
申请人 |
SK HYNIX INC. |
发明人 |
Lee Sang Bum |
分类号 |
H01L27/115 |
主分类号 |
H01L27/115 |
代理机构 |
William Park & Associates Ltd. |
代理人 |
William Park & Associates Ltd. |
主权项 |
1. A semiconductor apparatus, comprising:
a first pipe gate divided by an isolation layer; a first pipe channel layer buried in the first pipe gate; a second pipe gate covering the first pipe channel layer, the first pipe gate and the isolation layer, wherein the second pipe gate is in contact with the first pipe gate and the isolation layer; and a second pipe channel layer buried in the second pipe gate. |
地址 |
Icheon-Si KR |