Method and applications of thin-film membrane transfer

摘要

The disclosure relates to method and apparatus for micro-contact printing of micro-electromechanical systems (“MEMS”) in a solvent-free environment. The disclosed embodiments enable forming a composite membrane over a parylene layer and transferring the composite structure to a receiving structure to form one or more microcavities covered by the composite membrane. The parylene film may have a thickness in the range of about 100 nm-2 microns; 100 nm-1 micron, 200-300 nm, 300-500 nm, 500 nm to 1 micron and 1-30 microns. Next, one or more secondary layers are formed over the parylene to create a composite membrane. The composite membrane may have a thickness of about 100 nm to 700 nm to several microns. The composite membrane's deflection in response to external forces can be measured to provide a contact-less detector. Conversely, the composite membrane may be actuated using an external bias to cause deflection commensurate with the applied bias. Applications of the disclosed embodiments include tunable lasers, microphones, microspeakers, remotely-activated contact-less pressure sensors and the like.

主权项

1. A solvent-free method to form a micro-electromechanical structure, comprising
forming a receiving substrate, the receiving substrate having one or more ridges adjacent a cavity; forming a parylene layer over a supporting substrate, the parylene layer having a thickness of about 200 nm-1 micron; depositing a plurality of secondary layers over the parylene layer to form a composite membrane; removing the composite membrane from the supporting substrate by directly delaminating the parylene layer integrated with the composite membrane from the supporting substrate; and positioning the composite membrane over the receiving substrate to cover at least a portion of the cavity.