Self-heated pressure sensor assemblies

摘要

The present invention provides a self-heated pressure sensor assembly and method of utilizing the same. The self-heated pressure sensor assembly regulates and maintains the temperature of the pressure sensor, regardless of the external temperature environment, without an external heater as in prior art embodiments. Exemplary embodiments of the pressure sensor assembly incorporate a resistance heater that is built into the sensing chip of the pressure sensor assembly. The pressure sensor assembly also utilizes the resistance of the pressure sensing elements to monitor the temperature of the assembly, which works alongside the resistance heater to maintain a stable temperature within the pressure sensor assembly.

主权项

1. A pressure sensor assembly, comprising:
a silicon wafer comprising:
a heating element diffused into a portion of the silicon wafer;a resistive bridge comprising a plurality of piezoresistive elements adapted to measure an applied pressure and to provide a voltage indicative of temperature of the resistive bridge; andan oxide layer disposed on at least one surface of the silicon wafer and positioned between the heating element and the resistive bridge; wherein the heating element is adapted to provide heat to the resistive bridge based at least in part on the voltage indicative of the temperature of the resistive bridge.