Vibrating element, gyro sensor, electronic apparatus and moving object

摘要

A vibrating element includes first and second pairs of vibrating arms extending in opposite directions from a base. A pair of first suspension arms extends from the base via first connecting parts and are connected to a fixed portion attached to a container for the vibrating element so that the base, the pair of first suspension arms and the fixed portion surround the pair of first vibrating arms. A pair of second suspension arms extends from the base via second connecting parts and are connected to the fixed portion so that the pair of second suspension arms is located outside of the pair of first vibrating arms and the pair of first suspension arms.

主权项

1. A vibrating element comprising:
a base; a first vibrating arm extending along a first direction from the base; a second vibrating arm extending along a second direction opposite to the first direction, from the base; a first suspension arm extending along the first direction from a fixed portion and connected to a first connecting part of the base so that the base, the first suspension arm and the fixed portion surround the first vibrating arm; and a pair of second suspension arms extending along the first direction from the fixed portion, on both sides of the first suspension arm, and connected to a second connecting part of the base so that base, the pair of second suspension arms and the fixed portion surround the first vibrating arm and the first suspension arm; wherein one of the first vibrating arm and the second vibrating arm is a vibrating arm for driving, and the other is a vibrating arm for detection.