Method to produce chemical pattern in micro-fluidic structure

摘要

The present disclosure provides flow cells and methods of fabricating flow cells. The method includes combining three portions: a first substrate, a second substrate, and microfluidic channels between the first substrate and the second substrate having walls of a photoresist dry film. Through-holes for inlet and outlet are formed in the first substrate or the second substrate. Patterned capture sites are stamped on the first substrate and the second substrate by a nanoimprint lithography process. In other embodiments, parts of the patterned capture sites are selectively attached to a surface chemistry pattern formed of silicon oxide islands each disposed on an outcrop of a soft bottom layer.

主权项

1. A flow cell comprising:
a first substrate; a second substrate having through holes; a patterned photoresist dry film between the first substrate and the second substrate, wherein the patterned photoresist dry film forms microfluidic channel walls between the first substrate and the second substrate; and a plurality of patterned capture sites within microfluidic channels on at least one of the first substrate and the second substrate, wherein each of the plurality of patterned capture sites comprises a patterned adhesive promoter and a bio-medium; wherein at least one of the first substrate and the second substrate is transparent.