LASER MACHINING METHOD, LASER MACHINING DEVICE, AND LASER MACHINED ARTICLE

摘要

PROBLEM TO BE SOLVED: To provide a laser machining method and a laser machining device capable of executing surface machining such as fine holes or grooves not accompanied by peeling of a hard carbon film from a base material even when a laser of a wavelength transmitted through the hard carbon film is used, and a laser machined article method.SOLUTION: The laser machining method and the laser machining device for irradiating a hard carbon film formed on a base material with a laser beam to machine a hard carbon film includes the first step of forming a modified part for reducing transmittance for a machining pulse laser beam in the surface to the inside of the hard carbon film of the irradiation area of the machining pulse laser beam, and the second step of irradiating the modified part with the machining pulse laser beam.SELECTED DRAWING: Figure 1