| 摘要 |
PROBLEM TO BE SOLVED: To provide a technique that enables rapid measurement of the three-dimensional shape of a sample.SOLUTION: In a three-dimensional shape measurement device, a scanner 4 deflects lights from an LE2 to cause the lights to scan a sample 10. An objective 5 allows the lights from the LD2 to collect on the sample 10. A focus error detector 8 detects a focus error signal indicating whether the lights output from the LD2 are focused on the sample 10 based on lights returning from the sample 10. An operational unit 21 of a controller 20 calculates a defocus amount of the objective 5 based on a focus error signal, and calculates the three-dimensional shape of the sample 10 from the obtained defocus amount.SELECTED DRAWING: Figure 1 |
