| 摘要 |
PROBLEM TO BE SOLVED: To provide a technique advantageous to accurately measure a shape of an object.SOLUTION: A measurement instrument for measuring the shape of the object comprises an irradiation unit which irradiates the object with a line beam extending in a first direction, an imaging unit including a plurality of pixels for detecting a light intensity distribution in a second direction different from the first direction of the object, and a processing unit which acquires a peak position of the light intensity distribution. The processing unit generates signals in positions between pixels adjacent to each other, as interpolation signals in a section between two pixels among the plurality of pixels, which sandwich a pixel group having outputted pixel signals equal to or larger than a threshold and have outputted pixel signals smaller than the threshold, and uses signals equal to or larger than the threshold out of a plurality of signals including the pixel signals and the interpolation signals within the section, thereby to determine the peak position.SELECTED DRAWING: Figure 2 |
