| 摘要 |
PROBLEM TO BE SOLVED: To provide a laser processing apparatus which can form a plurality of light condensing points by branching a laser beam into a plurality without halving power density.SOLUTION: A laser processing apparatus comprises a pulse laser beam oscillator 51, a polarization beam splitter 53, a 1/4 wavelength plate 54 that converts a P polarization laser beam into circular polarization of light, a resonant scanner 55 that distributes the laser beam into a first path and a second path, a frequency setter 550 that sets a distribution frequency in the resonant scanner, first retrograde means 57a that makes a path retrograde by inclining the optical axis slightly from the optical axis of a pulse laser beam to reflect it, second retrograde means 57b that makes a path retrograde by inclining the optical axis slightly from the optical axis of a laser beam to reflect it, and a condenser 580 disposed in a path where a pulse laser beam made to retrograde by the first retrograde means and the second retrograde means is converted into S polarization of light by passing through the 1/4 wavelength plate and guided by the polarization beam splitter.SELECTED DRAWING: Figure 2 |
