CHARGED PARTICLE BEAM DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a charged particle beam device that can perform both of focus correction and reference adjustment (calibration) of an energy filter from an image obtained by one scanning operation.SOLUTION: A charged particle beam device has: a charged particle source for generating a charged particle beam; a focus adjusting unit for adjusting the focal position of the charged particle beam; a deflector for sweeping the charged particle beam on a sample; a detector for detecting charged particles occurring when the sample is irradiated with the charged particle beam; a detected charged particle screening unit for screening charged particles to be detected in the detector; and a control process unit for performing the focus adjustment of the focus adjusting unit and the reference adjustment of the detected charged particle screening unit by using information from the detector which is obtained through one scanning operation.SELECTED DRAWING: Figure 1A