| 摘要 |
PROBLEM TO BE SOLVED: To provide a small-sized fluid sensor enabling ultrahigh accuracy measurement on a fluidization field characteristic, a measurement method thereof, and a fluid measurement system.SOLUTION: A fluid sensor includes a substrate 101, a micro-nanofiber array 102, and measurement devices 104, 108. The micro-nanofiber array has: one end fixed to surface of the substrate 101 so that a plurality of micro-nanofibers has an included angle formed by a drawing direction of the micro-nanofibers and the surface of the substrate 101; and the other end being a free end and provided on the surface of the substrate.SELECTED DRAWING: Figure 1 |
