| 摘要 |
PROBLEM TO BE SOLVED: To provide a gyro sensor, electronic equipment, a mobile body or the like, which can produce an output with high accuracy.SOLUTION: The gyro sensor includes: a substrate 10; a vibrator 112; fixed drive electrodes 130, 132 and a movable drive electrode 116 to vibrate the vibrator 112; fixed monitor electrodes 160, 162 and a movable monitor electrode 118 to detect a vibration state of the vibrator 112; and a drive circuit 200 that generates a drive signal based on a signal from at least one of the fixed monitor electrodes 160, 162 and the movable monitor electrode 118 and outputs the drive signal to at least one of the fixed drive electrodes 130, 132 and the movable drive electrode 116. The movable monitor electrode 118 reciprocates; and a distance between the movable monitor electrode 118 and the fixed monitor electrodes 160, 162 in a direction orthogonal to the direction of reciprocating motion is smaller when the movable monitor electrode 118 is located at a first end that is one end in the reciprocating motion than the distance when the movable monitor electrode is located at the center of the reciprocating motion.SELECTED DRAWING: Figure 8 |
