发明名称 SEMICONDUCTOR ELEMENT HAVING SUBSTRATE ADAPTOR, MANUFACTURING METHOD OF SEMICONDUCTOR ELEMENT HAVING SOLID SUBSTRATE ADOPTOR AND METHOD OF CONTACTING SEMICONDUCTOR ELEMENT
摘要 PROBLEM TO BE SOLVED: To provide a method which improves reliability of a semiconductor device, especially a power semiconductor device, and which can be performed by a low-cost method.SOLUTION: A method of manufacturing at least one of semiconductor elements 10', 10'', 10''' having substrate adaptors 35', 35'', 35''' comprises: a step of laying conductive metal elements 12', 12'', 12'''; a step of coating a first lateral face of the semiconductor element with a contact material 11 in which the semiconductor element is arranged on a carrier element 20 with a second lateral face facing the carrier element 20; a step of positioning a laid metal element and the laid semiconductor element so as to be arranged in a manner such that a first lateral face of the laid metal element and the first lateral face of the semiconductor element coated with the contact material face each other; and a step of bonding the layered metal element to the semiconductor element coated with the contact material.SELECTED DRAWING: Figure 2
申请公布号 JP2016100604(A) 申请公布日期 2016.05.30
申请号 JP20150228534 申请日期 2015.11.24
申请人 HERAEUS DEUTSCHLAND GMBH & CO KG 发明人 MARTIN BLEIFUSS;ANDREAS HINRICH;ANDREAS KLEIN;SCHAEFER MICHAEL;ELISA WIESELER
分类号 H01L21/52;H01L21/301;H01L21/60 主分类号 H01L21/52
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