| 摘要 |
PROBLEM TO BE SOLVED: To provide a physical quantity sensor having excellent dimensional accuracy and high reliability and productivity, a method for manufacturing a physical quantity sensor, electronic equipment, and a mobile body.SOLUTION: The physical quantity sensor of the present invention includes: a support substrate 2; a gyro sensor element 3 disposed on one surface of the support substrate 2; an acceleration sensor element 4 disposed on the one surface of the support substrate 2 and at a position different from the gyro sensor element 3; a sealing substrate 5 that has a recessed part 51 accommodating the gyro sensor element 3, a recessed part 52 accommodating the acceleration sensor element 4, a through-hole 53 communicating with recessed part 51, and a through-hole 54 communicating with the recessed part 52 and that is joined to the one surface of the support substrate 2; a sealing material 6 filling the through-hole 53 to seal the recessed part 51; and a sealing material 7 filling the through-hole 54 to seal the recessed part 52. A melting point of the sealing material 6 is different from a melting point of the sealing material 7.SELECTED DRAWING: Figure 1 |
