发明名称 DRYER AND SEMICONDUCTOR STRIP GRINDER WITH THE SAME
摘要 The present invention relates to a dryer and a semiconductor strip grinder with the same. The dryer comprises a mounting plate for mounting a polished and cleaned working object, an elevating part which lowers the mounting plate from a predetermined reference position to a drying positon, a rotation motor which generates a torque, and a rotation part which transmits the torque of the rotation motor to the mounting plate and rotates the mounting plate. Cutting oil, cleaning water, and polishing particles which remain on a surface after a polishing process for removing a molding layer formed on the upper part of the unit substrate of a semiconductor strip and making thin the entire thickness of the semiconductor strip, can be completely dried and removed.
申请公布号 KR20160060425(A) 申请公布日期 2016.05.30
申请号 KR20140162734 申请日期 2014.11.20
申请人 SUHWOO TECHNOLOGY CO., LTD. 发明人 SONG, JIN KYU;GIM, DONG WOO;BAEK, HEUNG HYEON;PARK, MIN KYU;PARK, HYO SUN
分类号 H01L21/308;H01L29/66;H01L29/812 主分类号 H01L21/308
代理机构 代理人
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