发明名称 |
DRYER AND SEMICONDUCTOR STRIP GRINDER WITH THE SAME |
摘要 |
The present invention relates to a dryer and a semiconductor strip grinder with the same. The dryer comprises a mounting plate for mounting a polished and cleaned working object, an elevating part which lowers the mounting plate from a predetermined reference position to a drying positon, a rotation motor which generates a torque, and a rotation part which transmits the torque of the rotation motor to the mounting plate and rotates the mounting plate. Cutting oil, cleaning water, and polishing particles which remain on a surface after a polishing process for removing a molding layer formed on the upper part of the unit substrate of a semiconductor strip and making thin the entire thickness of the semiconductor strip, can be completely dried and removed. |
申请公布号 |
KR20160060425(A) |
申请公布日期 |
2016.05.30 |
申请号 |
KR20140162734 |
申请日期 |
2014.11.20 |
申请人 |
SUHWOO TECHNOLOGY CO., LTD. |
发明人 |
SONG, JIN KYU;GIM, DONG WOO;BAEK, HEUNG HYEON;PARK, MIN KYU;PARK, HYO SUN |
分类号 |
H01L21/308;H01L29/66;H01L29/812 |
主分类号 |
H01L21/308 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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