CHARGED PARTICLE BEAM DEVICE AND INSPECTION METHOD

摘要

PROBLEM TO BE SOLVED: To provide a charged particle beam device capable of acquiring information concerning the cross-sectional direction (depth direction) of a sample having an internal structure in a non-destructive manner and with little damage, and analyzing the depth of the internal structure and/or its dimensions in the depth direction.SOLUTION: The charged particle beam device includes: means 114 for establishing a time reference for a control signal; means (103, 110) for irradiating a sample 108 with a charged particle beam 119 synchronously with the time reference and controlling an irradiation position; means 115 for analyzing emission characteristics of emission electrons 120 from a detection signal for emission electrons from the sample 108; and means 117 for analyzing electrical characteristics or form characteristics in the cross-sectional direction of the sample 108 on the basis of the emission characteristics.SELECTED DRAWING: Figure 1