| 摘要 |
PROBLEM TO BE SOLVED: To provide a composite abrasive grain that is used in precision polishing of a material having high hardness and high brittleness to improve a polishing rate and polishing quality, and to provide a method for manufacturing the composite abrasive grain.SOLUTION: A composite abrasive grain 10 includes a base particle 12 that maintains a grain diameter set as the abrasive grain during polishing and has adhesiveness of hydrophilic fullerene derivatives 11 on a surface thereof, and a fullerene derivative coated layer 13 that is formed on a surface of the base particle 12 by chemically bonding the fullerene derivatives 11 to each other and has a thickness of 1-6 nm. The fullerene derivatives 11 may be fullerene hydroxides, and the base particle 12 may be a silica particle or a diamond particle.SELECTED DRAWING: Figure 2 |
