| 摘要 |
PROBLEM TO BE SOLVED: To provide a fluorescence X-ray analysis device and fluorescence X-ray analysis method that allow the device to be downsized, and allow even a large area sample to be efficiently measured.SOLUTION: A fluorescence X-ray analysis device comprises: a sample platform 2; an X-ray source; a detector; an X-stage; a Y-stage; a θ-stage and a shield container 8. An irradiation position P of a primary X-ray is set off a movable center O, and an irradiation range SA where the primary X-ray is irradiatable upon moving the X-stage and Y-stage with the θ-stage not moved is set to one sub-divided area where the irradiation position is arranged among four sub-divided areas A1 to A4 into which a surface of the sample platform is divided regarding a virtual division line B1 of an X-direction passing the movable center and virtual division line B2 of a Y-direction as a boundary, and the θ-stage is configured to rotate the sample platform for each 90° to allow the sub-divided area serving as the irradiation area to be changed over.SELECTED DRAWING: Figure 1 |
