| 摘要 |
PROBLEM TO BE SOLVED: To provide a scanning probe microscope that can acquire a magnetic property and an electrical property by a single measurement at once in addition to a surface shape.SOLUTION: A scanning probe microscope includes: a three-dimensional movement mechanism 1 that varies a relative position of a sample 3 surface and a probe 6 tip in a Z direction connecting both of them and within an XY plane perpendicular thereto; force measurement means (data processing unit 31) that, while resonantly oscillating the probe 6 tip, measures an interatomic force which acts between the sample 3 surface and the probe 6 tip, and at least one force out of a magnetic force and an electrostatic force which act therebetween; and volume data acquisition means (data processing unit 31) that acquires volume data being three-dimensional data of the at least two forces, by repeating such an operation that measurements are conducted by the force measurement means while varying a distance between the sample 3 surface and the probe 6 tip within a prescribed range in the Z direction by the three-dimensional movement mechanism, and thereafter the same measurements are conducted after varying a position of both of them within the XY plane.SELECTED DRAWING: Figure 2 |
