| 摘要 |
PROBLEM TO BE SOLVED: To provide: a carbon based film high in bearing pressure resistance; a method for manufacturing the same; and a slide member including the carbon based film high in bearing pressure resistance and having a wide range of application use.SOLUTION: A DLC film 50 is a multilayer film having a laminated structure obtained by alternately laminating a hard DLC layer 53 and an elastic DLC layer 52 softer than the hard DLC layer 51. The hard DLC layer 51 has a film composition including carbon, hydrogen and silicon, and the elastic DLC layer 52 has a film composition including carbon, hydrogen, silicon and nitrogen. The film thickness W2 of each elastic DLC layer 52 is larger than the film thickness W1 of each hard DLC layer 51. A ratio of the thickness of the hard DLC layer 51 to that of the elastic DLC layer 52 is approximately 1:2.SELECTED DRAWING: Figure 1 |
