| 摘要 |
PROBLEM TO BE SOLVED: To provide microlens fabrication method that allows for fabricating a microlens through a simplified manufacturing process.SOLUTION: A microlens fabrication method involves placing a substrate 6 coated with a microlens material on a substrate stage 4 on a cathode electrode 2 disposed opposite an anode electrode 3 in a chamber 1 of an etching device, placing a tabular master plate 5 that defines a master shape of a microlens between the substrate 6 and the anode electrode 3 to cover the entire substrate 6, and proceeding with an etching process making use of an etching characteristic called microloading effect to form a microlens.SELECTED DRAWING: Figure 1 |
