| 摘要 |
The invention relates to a process for obtaining thin nano-crystalline films based on barium titanate and strontium doped with 0.1...5% Cu on alumina-based planar sublayers provided with Cr or Pt interdigital electrodes, for applications in the field of miniature sensors for toxic gases such as ammonia and sulphuretted hydrogen. According to the invention, the process uses sintered targets of doped Ba and Sr titanate powders, hydrothermally sintered, and the film deposition is performed by laser ablation or RF-sputtering at an initial vacuum of 10Pa, while introducing Ar into the enclosure at a partial pressure ranging between 1...4 Pa, the source working power being of 70 W, the rotation speed of the carousel on which the sublayers are placed being 20 rpm, at a deposition process duration of 180 min, in the end nanostructured films being obtained, films with a thickness of 100...400 nm and an electric resistance ranging between 500...550 Ω . |
