OPTICAL INSPECTION METHOD

摘要

PROBLEM TO BE SOLVED: To provide an optical inspection method with which detection of defects can be performed with high sensitivity and the number of detection of artificial defects can be suppressed to efficiently perform defect inspection.SOLUTION: An optical inspection method includes: an inspection image acquisition step of acquiring a plurality of inspection images of an inspection target body with imaging means with a preset representative focus offset value having less artificial defects; and a defect candidate determination step of recognizing a defect candidate part in the inspection target body on the basis of the plurality of inspection images, and when the defect candidate part appears a plurality of times at the same coordinates in the plurality of inspection images, determining the defect candidate part as an actual defect candidate part.SELECTED DRAWING: Figure 2