| 摘要 |
PROBLEM TO BE SOLVED: To provide a sensor element capable of making a detection range wide.SOLUTION: In a sensor element 1 for detecting a physical amount by deflection of a membrane, a plurality of membranes 21 to 24 is provided and deflection amounts of each membrane 21 to 24 per unit pressure is set so that the deflection amounts are different from each other.SELECTED DRAWING: Figure 1 |
