| 摘要 |
PROBLEM TO BE SOLVED: To improve reliability of determination of a dew condensation state by reducing occurrence probability of erroneous detection.SOLUTION: A control device for a vacuum pump includes: a pump control unit for controlling a vacuum pump; a cooling device for cooling the pump control unit; a housing for accommodating the pump control unit; a temperature sensor for detecting one temperature out of the temperature in a first position and the temperature in a second position in which the temperature becomes higher than that in the first position in the housing; a humidity sensor for detecting humidity in the second position in the housing; a temperature estimation unit for estimating the other temperature out of the temperature in the first position and the temperature in the second position, based on the temperature detected by the temperature sensor; and a cooling control unit for controlling execution and stop of a cooling operation by the cooling device, based on the estimation temperature estimated by the temperature estimation unit, the temperature detected by the temperature sensor and the humidity detected by the humidity sensor.SELECTED DRAWING: Figure 2 |
