发明名称 A boat device for aluminum and producing method thereby
摘要 The present invention relates to a producing method for a boat device using aluminum nitride comprising the steps of: filling a cold isostatic pressing mold with aluminum nitride powder including one or more among yttrium oxide Y_2O_3, oxygen (O), carbon (C), calcium (Ca), iron (Fe), and silicon (Si); when the cold isostatic pressing mold is completely filled with aluminum nitride powder, performing cold isostatic pressing; removing fatty acids from the aluminum nitride molded body generated by the completion of the cold isostatic pressing; sintering the aluminum nitride molded body which is naturally cooled; and processing the sintered aluminum nitride molded body. The present invention is to use aluminum nitride, which has a high heat conductivity and superior corrosion resistance among ceramics and to prevent particles due to abrasion during the processes or washing.
申请公布号 KR20160060287(A) 申请公布日期 2016.05.30
申请号 KR20140162285 申请日期 2014.11.20
申请人 THERMTECS CO., LTD. 发明人 KO, SUNG KEUN;LIM, YOU DONG
分类号 H01L21/673;H01L21/22 主分类号 H01L21/673
代理机构 代理人
主权项
地址