POLISHING SURFACE CLEANING DEVICE, POLISHING DEVICE, AND MANUFACTURING METHOD OF POLISHING SURFACE CLEANING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a polishing surface cleaning device which makes a polishing liquid, such as slurry, less likely to adhere to a surface.SOLUTION: A polishing surface cleaning device includes: an arm 12 having a fluid passage 30; a nozzle 15 communicating with the fluid passage 30; and a welding material 35 for fixing the nozzle 15 to the arm 12. A gap between a bottom surface 12a of the arm 12 and an edge part 15b of an apical surface 15a of the nozzle 15 is filled with a welding material 35.SELECTED DRAWING: Figure 12