| 摘要 |
PROBLEM TO BE SOLVED: To provide a focus control method advantageous in suppressing a focus measurement error.SOLUTION: A focus control method controls a focus operation in pattern transfer on the basis of a surface position measurement result of a plurality of regions to be transferred formed at an object during pattern transfer and a correction value according to positions in the regions to be transferred calculated on the basis of an advance measurement result prior to the pattern transfer. The focus control method includes: a measurement step of measuring surface positions at a plurality of measurement positions with respect to each of the plurality of regions to be transferred formed on the object; a determination step of determining abnormality of measurement values obtained in the measurement step; and a calculation step of calculating correction values by removing abnormal measurement values out of the plurality of measurement values obtained in the measurement step and measurement values at measurement positions in cancellation relations concerning an object deformation with respect to the measurement positions of the abnormal measurement values.SELECTED DRAWING: Figure 7 |
