| 摘要 |
PROBLEM TO BE SOLVED: To shorten a time until an output voltage is converged to a target voltage, when switching the polarity of the output voltage and to suppress the increase of FPOT.SOLUTION: A power supply device includes a control part 250 which controls a positive voltage generation circuit 210 generating a positive voltage and a negative voltage generation circuit 220 generating a negative voltage. When performing switching so as to output the positive voltage from a state where the negative voltage is outputted and when an output voltage V2 in the period of a transient state is higher than a target voltage V1 (NO in S504), during a transient state period until a positive output voltage reaches the target voltage V1, the control part 250 performs control so that the positive voltage generation circuit 210 generates a voltage V3 different from the target voltage V1 (S506).SELECTED DRAWING: Figure 4 |
