| 摘要 |
The present invention provides an apparatus for manufacturing a replica stamp having a pressure member to accurately form a pattern, and a method for manufacturing a replica stamp using a pressure member. The apparatus for manufacturing a replica stamp according to an aspect of the present invention includes a stamp support unit for mounting a stamp, a substrate support unit which is separated from the stamp support unit and is to mount the substrate, and a pressure member which pressurizes the substrate to the stamp. The pressure member includes a support frame and a membrane which is combined with a support frame and has elasticity. In the support frame, a gas injection pipe for injecting a gas between the support frame and the membrane is connected to a gas discharge pipe for discharging a gas injected between the support frame and the membrane. |
