Manufacturing method of substrate graphene growth without using metal catalyst and substrate graphene growth without using metal catalyst and manufacturing device

摘要

Provided are a manufacturing method of catalyst-free substrate grown graphene, and a manufacturing apparatus of catalyst-free substrate grown graphene. More particularly, the manufacturing method of catalyst-free substrate grown graphene grows graphene on a substrate without including a catalyst layer by performing atmospheric pressure chemical vapor deposition (APCVD) while supplying carbon-containing gas. The manufacturing apparatus of catalyst-free substrate grown graphene comprises a solenoid spraying system fundamentally selecting a batch having a checkerboard shape.