| 发明名称 |
Resist stripper composition and a method of stripping resist using the same |
| 摘要 |
The present invention relates to a resist stripping composition including dimethylbutylamide, glycol amine, and glycolether and to a method for stripping a resist by using the same. The resist stripping composition according to the present invention has a low process loss, has excellent storage stability, and has a high resist stripping speed. |
| 申请公布号 |
KR20160059634(A) |
申请公布日期 |
2016.05.27 |
| 申请号 |
KR20140161337 |
申请日期 |
2014.11.19 |
| 申请人 |
DONGWOO FINE-CHEM CO., LTD. |
发明人 |
CHOI, HAN YOUNG;KO, KYUNG JUN;KIM, SUNG SIK;BAEK, SUNG HO;CHOI, SUN MI |
| 分类号 |
G03F7/42 |
主分类号 |
G03F7/42 |
| 代理机构 |
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