Manufacturing method of substrate graphene growth without using metal catalyst and substrate graphene growth without using metal catalyst and manufacturing device

摘要

Provided are a manufacturing method of catalyst-free substrate grown graphene, and a manufacturing apparatus of catalyst-free substrate grown graphene. More particularly, the manufacturing method of catalyst-free substrate grown graphene grows graphene on a substrate without including a catalyst layer through Van der Waals type heteroepitaxial growth by supplying carbon-containing gas and performing atmospheric pressure chemical vapor deposition (APCVD). The manufacturing apparatus of catalyst-free substrate grown graphene comprises a solenoid which has mechanical movement by moving a plunger inside a coil when an electric current is supplied to the coil.