Carbon nanotube emitter for X-ray source and method of fabricating the same

摘要

The present invention provides a method of manufacturing a carbon nano tube (CNT) emitter comprising the steps of: pressing a stamp mold on a resist layer on a substrate to transfer an uneven pattern of the stamp mold onto the resist layer; forming a resist pattern by etching the resist layer on which the uneven pattern is transferred; forming a catalyst layer on the substrate on which the resist pattern is formed; forming a catalyst pattern by removing the resist pattern and the catalyst layer arranged thereon; and growing a CNT on the catalyst pattern in CNT synthesizing equipment. According to the present invention, the manufacturing efficiency of a CNT emitter can be improved by manufacturing the CNT emitter using a direct growth method.