FLOWABLE FILM CURING PENETRATION DEPTH IMPROVEMENT AND STRESS TUNING

摘要

PROBLEM TO BE SOLVED: To improve control of a UV cure process of a flowable dielectric film.SOLUTION: A method comprises: forming a flowable dielectric layer on a substrate, the substrate being positioned in a processing region of a process chamber 402; delivering an oxygen-containing gas to the substrate and the processing region, the flowable dielectric layer being immersed in the oxygen-containing gas for a period of time creating a soaked dielectric layer 404; purging the oxygen-containing gas from the processing region after the immersion 406; and exposing the soaked dielectric layer to UV radiation to thereby at least partially cure the soaked dielectric layer 408.SELECTED DRAWING: Figure 4