发明名称 |
DRY RESIST LAYER TRANSCRIPTION FILM ROLL |
摘要 |
PROBLEM TO BE SOLVED: To provide a dry resist layer transcription film roll capable of forming an intermittent part between resist layers even in a thin-film dry film resist for forming a fine pattern, and of facilitating recognition of the intermittent part.SOLUTION: A dry resist layer transcription film roll (1) for transcribing a dry resist layer on a processed body and that is long in a film feeding direction, comprises: a first cover film (111) on whose one principal plane surface a fine unevenness structure (112) is formed; a transcription region (131) provided with a first mask layer (121) that is a dry resist layer, on the fine unevenness structure (112); and a non-transcription region (141) provided adjacently to the transcription region (131) without being provided with the first mask layer (121). A plurality of non-transcription regions (141) are provided in the film feeding direction.SELECTED DRAWING: Figure 1 |
申请公布号 |
JP2016096217(A) |
申请公布日期 |
2016.05.26 |
申请号 |
JP20140230804 |
申请日期 |
2014.11.13 |
申请人 |
ASAHI KASEI E-MATERIALS CORP |
发明人 |
YAMAGUCHI FUJITO;FURUIKE JUN |
分类号 |
H05K3/06;G03F7/004;G03F7/095 |
主分类号 |
H05K3/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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