发明名称 DRY RESIST LAYER TRANSCRIPTION FILM ROLL
摘要 PROBLEM TO BE SOLVED: To provide a dry resist layer transcription film roll capable of forming an intermittent part between resist layers even in a thin-film dry film resist for forming a fine pattern, and of facilitating recognition of the intermittent part.SOLUTION: A dry resist layer transcription film roll (1) for transcribing a dry resist layer on a processed body and that is long in a film feeding direction, comprises: a first cover film (111) on whose one principal plane surface a fine unevenness structure (112) is formed; a transcription region (131) provided with a first mask layer (121) that is a dry resist layer, on the fine unevenness structure (112); and a non-transcription region (141) provided adjacently to the transcription region (131) without being provided with the first mask layer (121). A plurality of non-transcription regions (141) are provided in the film feeding direction.SELECTED DRAWING: Figure 1
申请公布号 JP2016096217(A) 申请公布日期 2016.05.26
申请号 JP20140230804 申请日期 2014.11.13
申请人 ASAHI KASEI E-MATERIALS CORP 发明人 YAMAGUCHI FUJITO;FURUIKE JUN
分类号 H05K3/06;G03F7/004;G03F7/095 主分类号 H05K3/06
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