MEMS GYROS WITH QUADRATURE REDUCING SPRINGS

摘要

PROBLEM TO BE SOLVED: To provide MEMS gyros that allow reduced sensitivity to etch angle errors and reduce effect of quadrature errors.SOLUTION: A MEMS gyro comprises: a drive motor 112 configured to oscillate a suspended drive mass 114 around the z-axis with oscillating motion in a plane with the x and y-axes; and a plurality of drive springs 124 connecting the suspended drive mass 114 to an intermediate suspended mass 122 concentric with the suspended drive mass 112, with a spring set configuration which maintains desired resonant modes and consistently low quadrature errors even if each drive spring 124 has a cross-section having an etch angle that is oblique with respect to the z-axis.SELECTED DRAWING: Figure 2