| 摘要 |
PROBLEM TO BE SOLVED: To provide an X-ray inspection apparatus capable of detecting X-rays in a wide energy band at reduced manufacturing cost.SOLUTION: An X-ray inspection apparatus includes an X-ray irradiator, a line sensor assembly 14, and the like. The line sensor assembly 14 includes a plurality of detection units 41 among other things. Each detection unit 41 includes a scintillator 53, a detector body 52 including a plurality of elements disposed thereon, and a ceramic substrate 51 supporting them. In the line sensor assembly 14, the plurality of detection units 41 are arrayed in a front-back direction such that the scintillator 53 and detector body 52 of each detection unit 41 is arranged without a gap with the scintillator 53 and detector body 52 of an adjacent detection unit 41.SELECTED DRAWING: Figure 5 |
