Cryopump

摘要

A cryopump has a simple-to-manufacture frontal baffle plate with improved gas distribution and has a large-area second-stage array plate to capture Type II gases. The cryopump has a first-stage frontal baffle plate having orifices and flaps bent from and attached to the orifices. The cryopump has a second-stage top plate that is larger in area than cooling baffles of the second stage array.

主权项

1. A cryopump comprising:
a second stage having:
a plurality of cooling baffles, the plurality of cooling baffles thermally coupled to the second stage of a refrigerator, at least a portion of at least one cooling surface coated with an adsorbent material; anda top plate thermally coupled to the second stage of the refrigerator and arranged between a first stage array and the plurality of cooling baffles, the top plate extending beyond the plurality of cooling baffles as viewed from the frontal baffle.