| 摘要 |
PROBLEM TO BE SOLVED: To provide an atmospheric pressure plasma processing apparatus ensuring safe plasma processing, and capable of plasma processing even of the back surface of an object to be processed.SOLUTION: An atmospheric pressure plasma processing apparatus 101 includes an electrode pair 2 facing each other to form a fluid channel 11 and the slit-like exit 12 thereof, a power supply 5 for applying a voltage between the electrode pair 2, a processing chamber 6 where plasma processing for an object 50 to be processed is carried out, and a process gas supply section 9 for generating plasma between the electrode pair 2, by supplying process gas 31 to the fluid channel 11 and jetting gas containing this plasma to the internal space of the processing chamber 6 via the slit-like exit 12. When viewing the slit-like exit 12 side from above, the processing chamber 6 has a side specifying part 7 and a bottom surface specifying part 8 covering the lower part.SELECTED DRAWING: Figure 1 |
