| 摘要 |
PROBLEM TO BE SOLVED: To provide means capable of efficiently using a burn-in test device and a board handler device and also positioning a narrow-pitch semiconductor device of 0.3 mm in pitch etc., with high precision.SOLUTION: An inspection unit has a burn-in board and a test tray mounted on the burn-in board and accommodating a semiconductor device. The test tray (400) which accommodates the semiconductor device (D) and is mounted with a plurality of socket frames (420) to float within a predetermined range is mounted on the burn-in board (200), a contact guide (500) for positioning the semiconductor device (D) is stuck on a reverse surface of a socket frame (420), and the semiconductor device (D) and a connection terminal (201) of the burn-in board (200) are positioned and electrically connected with a contact substrate (600), provided to the burn-in board (200), interposed.SELECTED DRAWING: Figure 1 |
