发明名称 METHOD AND DEVICE FOR CLEANING SHADOW MASK
摘要 A method and device for cleaning a shadow mask. The method for cleaning a shadow mask comprises: providing an alkaline conductive solution (23), and immersing a shadow mask into the alkaline conductive solution (23); connecting the shadow mask to one of the anode and the cathode of a power supply, and immersing the other of the anode and the cathode into the alkaline conductive solution (23); and switching on the power supply, allowing the alkaline conductive solution (23) to perform ionization reaction and produce gas, and allowing the gas to remove contaminants from the shadow mask. In this way, dust, other particles and photoresist residues can be effectively removed from the shadow mask, the production yield rate of an organic light-emitting display panel can be increased, and the production cost can be reduced.
申请公布号 WO2016078113(A1) 申请公布日期 2016.05.26
申请号 WO2014CN92507 申请日期 2014.11.28
申请人 SHENZHEN CHINA STAR OPTOELECTRONICS TECHNOLOGY CO., LTD. 发明人 LI, JINCHUAN
分类号 H01L21/67;H01L21/02;H01L51/56 主分类号 H01L21/67
代理机构 代理人
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