| 摘要 |
PROBLEM TO BE SOLVED: To solve such a problem of a heterojunction back contact solar cell that it is difficult to form an electrode pattern on the back surface.SOLUTION: Solar cell can be provided with high productivity by including a step of forming a peeling layer on a part of one surface of a first conductivity type substrate, a step of laminating an i-type amorphous layer, a second conductivity type amorphous layer, and a metal layer, in this order, on the substrate surface including on the peeling layer, a step of forming a first opening by peeling the peeling layer and exposing the substrate under the peeling layer, a step of forming the i-type amorphous layer, and a first conductivity type amorphous layer, in this order, on the substrate surface including on the metal layer, a step of forming a second opening by removing the i-type amorphous layer and the first conductivity type amorphous layer on the metal layer, and a step of forming an electrode in the first and second openings.SELECTED DRAWING: Figure 6 |
