METHOD FOR MEASURING CROSS SECTIONAL SHAPE OF OBJECT TO BE MEASURED

摘要

PROBLEM TO BE SOLVED: To provide a method for measuring the cross sectional shape of an object to be measured, used for accurately measuring the shape of a work-piece and defining a position of the work-piece while reducing cost more than ever before.SOLUTION: A method for measuring the cross sectional shape of an object to be measured comprises: detecting one of two projecting portions of an object W to be measured; acquiring three-dimensional position information on the one projecting portion; rotating the object W to be measured by 180° to acquire three-dimensional position information on the other projecting portion; rotating the object W to be measured by 90° to acquire three-dimensional position information on one of two intermediate portions; rotating the object W to be measured W further by 180° to acquire three-dimensional position information on the other projecting portion; and calculating the cross sectional shape of the object W to be measured on the basis of the four acquired pieces of three-dimensional position information.SELECTED DRAWING: Figure 1