PRESSURE SENSOR USING PIEZOELECTRIC BENDING RESONATORS

摘要

A pressure sensor including an enclosure and a bending resonator housed in the enclosure. The bending resonator includes a diaphragm connected to the enclosure, a piezoelectric layer on the diaphragm, and an electrode on the piezoelectric layer. The pressure sensor also includes an electrical terminal coupled to the piezoelectric layer and extending out through the enclosure. The electrical terminal applies an input signal to the piezoelectric layer to resonate the bending resonator. A resonance frequency of the bending resonator changes according to a change in an external pressure applied to the pressure sensor and the resonance frequency of the bending resonator corresponds to the external pressure applied to the pressure sensor.

主权项

1. A pressure sensor, comprising:
an enclosure defining an interior cavity; a bending resonator housed in the interior cavity, the bending resonator comprising:
a diaphragm connected to the enclosure, the diaphragm comprising a first surface and a second surface opposite the first surface;at least one piezoelectric layer on one of the first surface or the second surface of the diaphragm; andat least one electrode on the at least one piezoelectric layer; and at least one electrical terminal coupled to the at least one piezoelectric layer and extending out through the enclosure, the at least one electrical terminal configured to apply an input signal to the at least one piezoelectric layer to resonate the bending resonator,
wherein a resonance frequency of the bending resonator changes according to a change in an external pressure applied to the pressure sensor, andwherein the resonance frequency of the bending resonator corresponds to the external pressure applied to the pressure sensor.