发明名称 POLISHING METHOD AND COMPOSITION FOR POLISHING
摘要 PROBLEM TO BE SOLVED: To provide a polishing method capable of efficiently making both compatible in smoothness and flatness for a high hardness material.SOLUTION: A method is provided for polishing a material having Vickers hardness of 1500 Hv or more. This polishing method includes a process of preliminarily polishing by using a preliminary polishing composition including an abrasive grain Aand a process of finishing-polishing by using a finishing polishing composition including an abrasive grain Alower in hardness than the abrasive grain A.SELECTED DRAWING: None
申请公布号 JP2016093884(A) 申请公布日期 2016.05.26
申请号 JP20150215119 申请日期 2015.10.30
申请人 FUJIMI INC 发明人 TAKAHASHI SHUHEI;TOMATSU MASATOSHI
分类号 B24B37/00;C09G1/02;C09K3/14;H01L21/304 主分类号 B24B37/00
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