发明名称 |
POLISHING METHOD AND COMPOSITION FOR POLISHING |
摘要 |
PROBLEM TO BE SOLVED: To provide a polishing method capable of efficiently making both compatible in smoothness and flatness for a high hardness material.SOLUTION: A method is provided for polishing a material having Vickers hardness of 1500 Hv or more. This polishing method includes a process of preliminarily polishing by using a preliminary polishing composition including an abrasive grain Aand a process of finishing-polishing by using a finishing polishing composition including an abrasive grain Alower in hardness than the abrasive grain A.SELECTED DRAWING: None |
申请公布号 |
JP2016093884(A) |
申请公布日期 |
2016.05.26 |
申请号 |
JP20150215119 |
申请日期 |
2015.10.30 |
申请人 |
FUJIMI INC |
发明人 |
TAKAHASHI SHUHEI;TOMATSU MASATOSHI |
分类号 |
B24B37/00;C09G1/02;C09K3/14;H01L21/304 |
主分类号 |
B24B37/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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