| 摘要 |
An illumination optical unit serves to illuminate an illumination field in which an object to be imaged is arrangeable. The illumination optical unit comprises at least one facet mirror and one deflection mirror assembly (5b) in the beam path of an illumination light beam (22) upstream of the facet mirror. The deflection mirror assembly (5b) is embodied in such a way that it deflects a centroid ray (Sin, Sout) of the illumination light beam (22) by at least 10°. The deflection mirror assembly (5b) has at least two mirrors (23, 24) for grazing incidence. These each reflect a dedicated partial beam (25, 26) of the overall illumination light beam (22). What emerges is an illumination optical unit which can be adapted to various light source configurations with little outlay. |
