| 摘要 |
PROBLEM TO BE SOLVED: To provide an assembly for adjusting gas flow patterns and gas-plasma interactions.SOLUTION: An assembly includes a toroidal plasma chamber. The toroidal plasma chamber includes an injection part, an output part, a first side member and a second side member. The first side member connects a first gas inlet of the injection part to the output part, and the second side member connects a second gas inlet of the injection part to the output part. The cross-sectional area of a pass passage in the first side member is different from that of a gas passage in the second side member. The assembly further includes: a first gas injector for injecting first gas into the toroidal plasma chamber through the first gas inlet of the injection part; and a second gas injector for injecting second gas into the toroidal plasma chamber through the second gas inlet of the injection part.SELECTED DRAWING: Figure 3B |
