| 摘要 |
PROBLEM TO BE SOLVED: To provide an extreme ultraviolet light source device, capable of extending a life of an optical element inside the device and outputting stable EUV light, during a burst operation.SOLUTION: In an extreme ultraviolet light source device, a target 13 is irradiated with a main pulse L1 to emit EUV light L generated by burst oscillation. The extreme ultraviolet light source device includes a burst control unit C1 for controlling such that, during a burst operation in which the burst oscillation is performed, the main pulse L1 is output while a driver laser 1 outputting the main pulse L1 is in a continuous emission operation, and, when continuous emission during the burst operation is paused, the target material 13 is prevented from being irradiated with the main pulse L1 at a plasma emission site P10 of the EUV light L to pause the emission of the EUV light L.SELECTED DRAWING: Figure 1 |
